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Compared to molybdenum: Molybdenum is also a commonly used sputtering target with good high temperature performance. However, tungsten has higher durability and a higher melting point. This makes tungsten more suitable for extremely high temperature applications, where molybdenum may not withstand high temperatures as effectively.

Compared to aluminum: Aluminum targets are more suitable for applications that require a lower melting point due to their higher electrical and thermal conductivity. But for high power applications that may cause rapid target degradation, tungsten's robustness allows it to last longer. Aluminum corrodes faster under high energy conditions than tungsten.

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